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‘Influence of the silicon rich oxide (SRO) as passivation layer on the microwave attenuation losses of the coplanar wave guides (CPWs) fabricated on high resistivity silicon (HR-Si)’

J.A. Reynoso-Hernández, R. Rangel Rojo, M. Aceves, I. Zaldivar, L.E. Sánchez, M. Herrera, ‘Influence of the silicon rich oxide (SRO) as passivation layer on the microwave attenuation losses of the coplanar wave guides (CPWs) fabricated on high resistivity silicon (HR-Si)’, IEEE Microwave and Wireless Components Letters 13, 508-510 (2003).